Polymers in microlithography - materials and processes
- Författare
- American Chemical Society Takao Iwayanagi Scott A MacDonald Elsa Reichmanis
- (Elsa Reichmanis, editor, Scott A. McDonald, editor, Takao Iwayanagi, editor., Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering ... Dallas, Texas, April 9-14, 1989)
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation, Bibliografi
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| ACS | 1989 | USA, Washington, D.C | xii, 449 sidor. |